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Method for Fabrication of Recessed Electrical Elements

Method for Fabrication of Recessed Electrical Elements

Patent: EP 3975224 B1
Authors: Irmantas Kašalynas, Simonas Indrišiūnas, Pawel Prystawko, Piotr Kruszewski

Description: The invention relates to the fabrication of recessed and regrown electrical contacts for wide-bandgap group III nitride semiconductor components using ultrashort pulsed laser microprocessing.

State Research Institute Center for
Physical Sciences and Technology
Public institution
Code 302496128
VAT code LT100005300110

Savanorių st. 231, LT-02300 Vilnius
+370 645 15550
info@ftmc.lt

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