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Manufacturing Method for Recessed Electrical Components

Manufacturing Method for Recessed Electrical Components

Patent: LT 6909 B
Authors: Irmantas Kašalynas, Simonas Indrišiūnas, Pawel Prystawko, Piotr Kruszewski

Description: The invention describes a laser microprocessing method for forming recessed electrical contacts and conductive components in III-N semiconductor heterostructures.

State Research Institute Center for
Physical Sciences and Technology
Public institution
Code 302496128
VAT code LT100005300110

Savanorių st. 231, LT-02300 Vilnius
+370 645 15550
info@ftmc.lt

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